The Resource Dopant incorporation efficiency in CVD silicon carbide epilayers, D.J. Larkin, (microform)

Dopant incorporation efficiency in CVD silicon carbide epilayers, D.J. Larkin, (microform)

Label
Dopant incorporation efficiency in CVD silicon carbide epilayers
Title
Dopant incorporation efficiency in CVD silicon carbide epilayers
Statement of responsibility
D.J. Larkin
Creator
Contributor
Subject
Language
eng
Member of
Cataloging source
GPO
http://library.link/vocab/creatorName
Larkin, D. J
Government publication
federal national government publication
Index
no index present
Literary form
non fiction
http://library.link/vocab/relatedWorkOrContributorName
United States
Series statement
NASA-TM
Series volume
112756
http://library.link/vocab/subjectName
  • Vapor deposition
  • Silicon carbides
  • Epitaxy
  • Additives
Label
Dopant incorporation efficiency in CVD silicon carbide epilayers, D.J. Larkin, (microform)
Instantiates
Publication
Note
Shipping list no.: 98-0613-M
Carrier category
microform
Carrier MARC source
local
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Extent
1 volume .
Form of item
microfiche
Media category
microform
Media MARC source
rdamedia
Media type code
h
http://bibfra.me/vocab/marc/reductionRatio
Reproduction note
Microfiche.
Stock number
19970019642
System control number
  • (GPO)99040448
  • (Sirsi) a763540
Label
Dopant incorporation efficiency in CVD silicon carbide epilayers, D.J. Larkin, (microform)
Publication
Note
Shipping list no.: 98-0613-M
Carrier category
microform
Carrier MARC source
local
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Extent
1 volume .
Form of item
microfiche
Media category
microform
Media MARC source
rdamedia
Media type code
h
http://bibfra.me/vocab/marc/reductionRatio
Reproduction note
Microfiche.
Stock number
19970019642
System control number
  • (GPO)99040448
  • (Sirsi) a763540

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