The Resource Characterization of high Ge content SiGe heterostructures and graded alloy layers using spectroscopic ellipsometry, A.R. Heyd, S.A. Alterovitz, E.T. Croke, (microform)

Characterization of high Ge content SiGe heterostructures and graded alloy layers using spectroscopic ellipsometry, A.R. Heyd, S.A. Alterovitz, E.T. Croke, (microform)

Label
Characterization of high Ge content SiGe heterostructures and graded alloy layers using spectroscopic ellipsometry
Title
Characterization of high Ge content SiGe heterostructures and graded alloy layers using spectroscopic ellipsometry
Statement of responsibility
A.R. Heyd, S.A. Alterovitz, E.T. Croke
Creator
Contributor
Subject
Language
eng
Member of
Cataloging source
GPO
http://library.link/vocab/creatorName
Heyd, A. R
Government publication
federal national government publication
Index
no index present
Literary form
non fiction
http://library.link/vocab/relatedWorkOrContributorName
  • Alterovitz, S. A
  • Croke, E. T
  • United States
Series statement
NASA-TM
Series volume
112114
http://library.link/vocab/subjectName
  • Algorithms
  • Substrates
  • Silicon compounds
  • Germanium
  • Ellipsometry
  • Dielectrics
Label
Characterization of high Ge content SiGe heterostructures and graded alloy layers using spectroscopic ellipsometry, A.R. Heyd, S.A. Alterovitz, E.T. Croke, (microform)
Instantiates
Publication
Note
Shipping list no.: 97-0960-M
Carrier category
microform
Carrier MARC source
local
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Extent
1 volume .
Form of item
microfiche
Media category
microform
Media MARC source
rdamedia
Media type code
h
http://bibfra.me/vocab/marc/reductionRatio
Reproduction note
Microfiche.
Stock number
19960005485
System control number
  • (GPO)99040688
  • (Sirsi) a763638
Label
Characterization of high Ge content SiGe heterostructures and graded alloy layers using spectroscopic ellipsometry, A.R. Heyd, S.A. Alterovitz, E.T. Croke, (microform)
Publication
Note
Shipping list no.: 97-0960-M
Carrier category
microform
Carrier MARC source
local
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Extent
1 volume .
Form of item
microfiche
Media category
microform
Media MARC source
rdamedia
Media type code
h
http://bibfra.me/vocab/marc/reductionRatio
Reproduction note
Microfiche.
Stock number
19960005485
System control number
  • (GPO)99040688
  • (Sirsi) a763638

Library Locations

    • Central Library, Jesse H. Jones BuildingBorrow it
      500 McKinney St., Houston, TX, 77002, US
      29.759431 -95.369953
Processing Feedback ...